Ion-beam modification of surface geometical properties of materials

In this short review article several important problems relating to ion-beam modificaton of surface geometrical properties of materials, especially surface roughness alteration and formation of topograpical elements, are presented. First, the influence of ion bombardment conditions on main roughness parameters (vertical; Ra, Rz, Rm and horizontal Sm) is shown. Beaucose alteration of houghness is inevitably connected with surface topography changes, i.e. with generation of new topographical elements and/or vanishing of the others, this issue is also considered here. Finally, a role of surface roughness (or in broader meaning: surface geometrical properties) in various branches of science and technology, particularly in microelectronics, surface analysis and medicine is discussed.