Sol-gel Al2O3 antireflection coatings for silicon solar cells

Purpose: This paper presents the results of investigations on morphology and optical properties of the prepared aluminium oxide thin films Design/methodology/approach: Thin films were prepared with use of sol-gel spin coating method. The changes of surface morphology were observed in topographic pictures performed with the atomic force microscope AFM. Obtained roughness coefficients values were generated with XEI Park Systems software. The thickness distribution were checked with spectroscopic ellipsometry with use of mapping mode. The optical reflection spectra were measured with UV-Vis spectrophotometry. Findings: Results and their analysis show that the sol-gel method allows the deposition of homogenous thin films of Al2O3 with the desired geometric characteristics and good optical properties. Practical implications: The technology of sol-gel aluminium oxide thin films deposition causes that mentioned thin films are good potential material for optics, optoelectronics and photovoltaics. Originality/value: The paper presents some results of investigations on aluminium oxide thin films prepared with sol-gel spin coating method on polished monocrystalline silicon.