Structural study of InGaAs/GaAs heterostructures.

This paper reports results of the investigation of the influence of the profile of indium content in a InxGa1-xAs layer on the formation of dislocations. In GaAs/GaAs heterostructures were grown by molecular beam epitaxy (MBE). Cross-sectional transmission electron microscopy (TEM) and x-ray diffractometry was involved. A difference in dislocation structure was observed in a heterostructure with a graded-index layer and with InxGa1-xAs multilayers.