Assessment of selected parameters of the geometric structure of the surface based on mechanical and electromagnetic mapping

The article analyses the problem of assessing the topography of mechanical and electromagnetic surfaces obtained by various contact and non-contact scanning techniques. The electromagnetic surface of the scanned topography was obtained using various scanning techniques and methods such as Confocal, Focus Variation and coherence scanning interferometry technique and Confocal Fusion method. To improve the correlation between mechanical and electromagnetic surfaces, morphological filters were used based on two basic operations: dilation and erosion. Additionally, for the coherence scanning interferometry technique, the quality of the topography of the scanned surface was assessed using two colours of light: green and white. It was found that the use of morphological filtration has little impact on changes in roughness parameters. It was observed that the best agreement between electromagnetic and mechanical surfaces was obtained when working with the interferometry technique.