Hybrid photonics structures with grating and prism couplers based on ZnO waveguides

This paper presents the results of investigations concerning input-output systems of an electromagnetic wave in the visible and near visible spectrum for their application in structures of integrated optics. The input-output structures used in described planar optical waveguides are in a form of prism and grating couplers. The first part of the paper contains numerical analysis of grating couplers aiming at an optimization of their geometrical parameters, strictly – the depth of the grooves in the grating coupler. The second part presents the practical realization, as well as experimental tests of the planar optical waveguide with the hybrid input-output system. As the input system of the electromagnetic wave, a prism coupler was used, and in the case of the output system – a photonic structure with grating coupler was applied. The investigated planar wave guides with the input-output structures were made of a wide energy band gap semiconductor – zinc oxide (ZnO).