Simulation of the microhardness and internal stresses measurement of PVD coatings by use of FEM

Purpose: The goal of this work is to determine microhardness of coats and stresses obtained in PVD process with the use of finite elements method and comparative analysis with results obtained by laboratory investigations. Design/methodology/approach: Article introduce the usage of finite elements method for simulation of microhardness and stresses measurement process in TiN and TiC coats obtained in magnetron PVD process on high-speed steel ASP 30. Simulation of indenters depression in investigated coat permitted on disclosure of deformation of the layer PVD and allows to create the maps of stresses. Findings: Basing tensions obtained as a result of indenter depression in investigated surfaces we obtained the maps of stresses, deformations analyzed of coats, and then we calculated the microhardness. Research limitations/implications: On the basis of tensions in investigated coat obtained in result of computer simulation effected in ANSYS software environment was possible to compute the microhardness of the coating, and the results was compared with the microhardness data of coats received by physical examination with use of the Vickers method. Originality/value: From results of the simulation based on the finite element method is possible to compute the mechanical properties of coatings obtained in PVD process.