Modułowa komora technologiczna do realizacji procesów PVD

The article presents a model technical solution for modular vacuum chamber and a technological instrumentation for different experimental performance of PVD (Physical Vapour Deposition) coating processes with use of thin surface layers. A structure of the research stand is presented with main construction elements. Reconfiguration of the effector and control modules allows performing a research and development of introducing novelty technologies for physical deposition of coating from the gas phase. All those configuration possibilities allow performing the technological processes with use of arc and magentron sources. A developed chamber structure includes different connection ports and allows performing an analysis of the pyrometric measurement of temperatures processes and spectral analysis of the deposited layers in situ composition. The chamber uses novelty solution for protection of the AEGD (Arc-Enhanced Glow Discharge) electrode against harmful deposition of the products of PVD. A similar solution is used to protect materials against evaporation and impurities among substances in the plasma stream.