Non-standard techniques of surface characterization in scanning electron microscope

In this paper the specific techniques considerably extending the capabilities of a standard scanning electron microscopy (SEM) for quantitative topographic and voltage contrasts, supplemented by those concerning the low energy and the high pressure microscopy, are discussed. The techniques involve special detector systems combined with proper signal processing units. They have been designed mainly for investigations of semiconductor materials and devices, however they may be also useful in other fields of technology