Tytuł pozycji:
Preparation and properties of colloidal nanosize silica dioxide for polishing of monocrystalline silicon wafers
Colloidal silica can be used for final general metallographic polishing. It is used to polish single crystal silicon for electronic applications and, subsequently, polycrystalline silicon for solar cells, gallium arsenide, indium phosphide, titanium, gadolinium gallium garnet and sapphire. The silica dioxide are dispersed in water with alkaline compound added to obtain the desired pH.