Optical channel structures based on sol-gel derived waveguide films

Rib waveguides were fabricated with the use of selective, wet chemical etching of two-component waveguide films SiO2:TiO2 which were obtained using the sol-gel method. Photoresist was applied as a mask in the process. The etching of the layers SiO2:TiO2 was carried out in water solutions of ammonia fluoride. The paper presents the results of theoretical analysis as well as the power distributions in the obtained strip waveguides and directional couplers.