Research and fabrication of integrated optical chip of Mach-Zehnder microinterference accelerometer

A novel hybrid-integrated optical accelerometer, based on Mach-Zehnder interference, is described. The integrated Mach-Zehnder microinterferometer chip is investigated theoretically and experimentally. On the LiNbO3 substrate with the dimensions of 38 mm×6 mm×2 mm, MMI optical power splitter, Y-branching guide, phase modulator and polarizers are integrated to constitute the Mach-Zehnder microinterference chip. The performance of a prototype of the accelerometer is characterised. The measured frequency spectrum is in good agreement with the theoretical prediction.