Structure and properties of the multilayers produced on inconel 600 by PACVD method with the participation of trimethylaluminium vapours

The paper presents the results of examinations of the structure and properties of Al2O3 + Ni3Al + Ni(Cr, Fe, Al) + Cr-Ni + Cr7C3 multilayers produced on nickel alloys by the plasma assisted chemical vapour deposition method with the participation of trimethylaluminum vapours in gaseous atmosphere. The layers have a high surface hardness of about 1200HV0.05, and high heat and frictional wear resistance. In order to find a correlation between the structure of the multilayers and their properties, the following examinations have been executed: phase analysis by XRD and surface analysis by XPS, analysis of microstructure by optical and scanning electron microscopes as well as X-ray microanalyser, micro-hardness measurements, corrosion and frictional wear resistance testing.