On Improving Performance of MEMS Accelerometers in Tilt Sensing

The most significant methods of increasing accuracy of tilt measurements have been presented in the paper. The measurements referred to are to be performed under quasi-static conditions by means of miniature tilt sensors built of MEMS accelerometers. Some of the methods consist in modifications of the existing MEMS accelerometers, whereas the other can be useful while using other types of commercially available accelerometers, including those manufactured with application of conventional technologies.