- Tytuł:
-
Numerical scheme for research of processing procedures in micro and nano electronic devices
Matematicheskaja model issledovanija tekhnologicheskikh processov mikro- i nanoelektronnykh priborov - Autorzy:
-
Yeroshin S.
Bublichenko S. - Tematy:
-
numerical scheme
technology system
fine mechanics
single crystal
processing procedure
microelectronic device
nanoelectronic device
fine wafer cutting
cutting system
semiconductor device
integrated circuit - Pokaż więcej
- Dostawca treści:
- AGRO
Artykuł