- Tytuł:
- Accurate determination of matrix composition in semiconductor material using MS-SIMS and ToF-SIMS methods
- Autorzy:
- Przeździecka, Ewa
- Współwytwórcy:
- Przeździecka, Ewa
- Data publikacji:
- 2025-03-07
- Wydawca:
- RepOD
- Tematy:
-
Physics
This study focuses on the method for determining the exact composition for semiconducting material using secondary ion mass spectrometry. The calibration curve method is employed to establish a quantitative relationship between the intensity of secondary ions and the concentrations of elements in thin films. Additionally, the study compares the relative sensitivity factors with the calibration curve method for determining the value of x in . A comparison between the performances of Time of Flight and Magnetic Sector SIMS in analyzing thin films is also presented. This approach aims to enhance the accuracy and reliability of quantitative analysis in SIMS for thin films. - Pokaż więcej
- Dostawca treści:
- Repozytorium Otwartych Danych
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